Fort Collins, Colorado (ots/PRNewswire)

- Next-Generation Pressure-Insensitive MFC for Etch, CVD, PVD and
Diffusion Processes Enables Exceptionally Fast Response and Higher
Yields

Advanced Energy Industries, Inc. (Nasdaq: AEISE) today unveiled
its next-generation Aera(R) PI-980(TM) series of pressure-insensitive
mass flow controllers (MFCs) for advanced semiconductor applications.
Designed to improve processes for etch, CVD, PVD and diffusion, the
PI-980 MFC's innovative technology provides greater gas-flow
stability, higher accuracy, exceptionally fast response and superior
real-time process control. Its highly stable flow delivers greater
process control and repeatability, maximizing production yields.

(Logo: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO)

The PI-980 series complements the recently released Aera
Transformer(TM) 780/7800 series of digital MFCs, allowing fabs and
OEMs to standardize on the latest technologies from Aera across
multiple process steps and varied application requirements.

By combining exceptionally fast NeuralStep(TM) control technology
with an integrated pressure transducer, the PI-980 MFC dramatically
increases the speed of the MFC response. This increased speed
virtually eliminates the effects of upstream and downstream pressure
disturbances. Faster response delivered with excellent flow stability
enable shorter process steps, stable chamber-gas delivery, higher
accuracy, higher repeatability and a wide, multi-gas control range.
The result is optimized process performance and maximized yields.

Further, the PI-980 MFC enhances overall system cost of ownership
by eliminating the need for a number of traditional, costly gas-panel
components. Its multi-gas, multi-range functionality dramatically
reduces inventory requirements.

Steve Rhoades, executive vice president, Products and Operations,
noted, "Our new PI-980 MFCs with NeuralStep technology are a
best-in-class addition to Aera's world renowned line of MFCs. This is
a great example of AE's continuing commitment to technology
innovation. It's also a great example of AE's continuing commitment
to increasing our customers' competitive advantage."

About Advanced Energy

Advanced Energy is a global leader in the development and support
of technologies critical to high-technology manufacturing processes
used in the production of semiconductors, flat panel displays, data
storage products, compact discs, digital video discs, architectural
glass and other advanced product applications.

Leveraging a diverse product portfolio and technology leadership,
AE creates solutions that maximize process impact, improve
productivity and lower cost of ownership for its customers. This
portfolio includes a comprehensive line of technology solutions in
power, flow management, thermal instrumentation and plasma and ion
beam sources for original equipment manufacturers (OEMs) and
end-users around the world.

AE operates in regional centers in North America, Asia and Europe
and offers global sales and support through direct offices,
representatives and distributors. Founded in 1981, AE is a publicly
held company traded on Nasdaq National Market under the symbol AEIS.
More information can be found at www.advanced-energy.com

Advanced Energy, AE, Aera and PI-980 are trademarks of Advanced
Energy Industries.

Web site: http://www.advanced-energy.com

Contact:

Marna Shillman, Corporate Communication Manager of Advanced Energy
Industries, Inc., +1-970-407-6280, marna.shillman@aei.com; or Angie
Kellen, Sr. Account Manager of MCA, +1-650-968-8900,
akellen@mcapr.com, for Advanced Energy Industries, Inc./Photo:
NewsCom: http://www.newscom.com/cgi-bin/prnh/20030825/AEISLOGO, AP
Archive: http://photoarchive.ap.org, PRN Photo Desk,
photodesk@prnewswire.com